chemically amplified resist

The development of research for acid proliferation generator (APG) was reviewed and some kinds of APG having application prospect and their reaction mechanism were introduced in detail;the usage of APG in chemically amplified photoresist and UV solidification materials,and CTP were also discussed in this review.

讨论了酸增殖剂在化学增幅型抗蚀剂体系、UV紫外光固化材料、CTP制版中的应用 。