plasma enhanced CVD system

Study of Low Temperature Plasma Enhanced Chemical Vapor Deposition and the Preparation of Si_3N_4 Thin Film;

低温等离子体增强CVD技术及制备氮化硅薄膜的研究

plasma-enhanced CVD

等离子体增强ＣＶＤ

The Research of Synthesis Technology and Mechanism on Diamond Films at Low Temperature in MWPCVD;

微波等离子体低温CVD金刚石膜工艺和机理研究

The Research about Mechanism of Plasma arc Polishing CVD Diamond Films

CVD金刚石膜等离子体弧抛光的机理研究

Ultra-thin C-N-Si Protective Films Prepared by Plasma Enhanced Deposition;

等离子体增强沉积C-N-Si超薄保护膜

Deposition of orthorhombic boron nitride films by plasma-enhanced pulsed laser deposition

等离子体增强脉冲激光沉积o-BN薄膜

Microstructure and Properties of a-Si_(1-x)C_x:H Thin Films Prepared by PECVDs;

等离子体CVD法制备a-Si_（1-x）C_x：H薄膜及其微结构和性能研究

The Synthesized Processing Study of Diamond Films Deposition on the WC-Co Tools Substrate by DC Arc Discharge Plasma CVD;

直流弧光放电等离子体CVD金刚石薄膜硬质合金刀具制备工艺研究

APPLICATION OF MAGNETIC MIRROR IN DIRECT COUPLER MPCVD DIAMOND FILMS DEVICE

磁镜场在直接耦合式微波等离子体CVD金刚石膜装置中的应用

Prepared TiN Thin Films by LTP Enhanced Electronic Beam Evaporation;

低温等离子体增强电子束蒸发沉积TiN的研究

Photoluminescence Enhancement of Silicon-based Semiconductor Materials by Coupling with Metal Surface Plasmon

金属表面等离子体增强硅基半导体材料发光

high ionized laser plasma

强电离激光等离子体

A Study on Numerical Simulation of Ignition and Combustion Enhancement with Plasma in Bore of ETC Guns

膛内等离子体点火及燃烧增强过程数值模拟

Study on Device of Magneto-active Plasma Enhanced Chemical Vapor Deposition;

磁激活等离子体增强化学气相沉积设备的研制

The Study on DLC Films Deposited by PECVD;

等离子体增强化学气相沉积DLC膜的研究

Numerical Simulation of Interior Ballistic Process Augmentation by Plasma;

等离子体增强作用的内弹道过程数值模拟

Study on device of magneto-active PECVD;

磁激活增强等离子体化学气相沉积设备的研制

Study of Enhancement Effect of Laser-Induced Crater on Plasma Radiation

激光诱导熔穴对等离子体辐射增强效应的研究